2010, ISBN: 3642077285
[EAN: 9783642077289], Neubuch, [SC: 0.0], [PU: Springer Berlin Heidelberg], ATOMICFORCECMOSCOMPATIBLEMICROMACHINING; CHEMICAL SENSOR; SENSORS; MICROSCOPY, Druck auf Anfrage Neuware - This… More...
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ISBN: 9783642077289
This book is intended for scientists and engineers in the field of micro- and nano electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-ba… More...
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2010, ISBN: 3642077285
Softcover reprint of the original 1st ed. 2002 Kartoniert / Broschiert Wissenschaftliche Standards, Normung usw., Angewandte Physik, Ingenieurswesen, Maschinenbau allgemein, Nanotechnol… More...
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2010, ISBN: 3642077285
Softcover reprint of the original 1st ed. 2002 Kartoniert / Broschiert Wissenschaftliche Standards, Normung usw., Angewandte Physik, Ingenieurswesen, Maschinenbau allgemein, Nanotechnol… More...
Achtung-Buecher.de MARZIES.de Buch- und Medienhandel, 14621 Schönwalde-Glien Shipping costs:Versandkostenfrei innerhalb der BRD. (EUR 0.00) Details... |
2010, ISBN: 9783642077289
Atomic Force Microscopy and Gas Sensing Applications, Buch, Softcover, Softcover reprint of the original 1st ed. 2002, [PU: Springer Berlin], Springer Berlin, 2010
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2010, ISBN: 3642077285
[EAN: 9783642077289], Neubuch, [SC: 0.0], [PU: Springer Berlin Heidelberg], ATOMICFORCECMOSCOMPATIBLEMICROMACHINING; CHEMICAL SENSOR; SENSORS; MICROSCOPY, Druck auf Anfrage Neuware - This… More...
ISBN: 9783642077289
This book is intended for scientists and engineers in the field of micro- and nano electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-ba… More...
2010
ISBN: 3642077285
Softcover reprint of the original 1st ed. 2002 Kartoniert / Broschiert Wissenschaftliche Standards, Normung usw., Angewandte Physik, Ingenieurswesen, Maschinenbau allgemein, Nanotechnol… More...
2010, ISBN: 3642077285
Softcover reprint of the original 1st ed. 2002 Kartoniert / Broschiert Wissenschaftliche Standards, Normung usw., Angewandte Physik, Ingenieurswesen, Maschinenbau allgemein, Nanotechnol… More...
2010, ISBN: 9783642077289
Atomic Force Microscopy and Gas Sensing Applications, Buch, Softcover, Softcover reprint of the original 1st ed. 2002, [PU: Springer Berlin], Springer Berlin, 2010
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Details of the book - CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications
EAN (ISBN-13): 9783642077289
ISBN (ISBN-10): 3642077285
Hardcover
Paperback
Publishing year: 2010
Publisher: Springer Berlin
152 Pages
Weight: 0,240 kg
Language: eng/Englisch
Book in our database since 2011-09-23T08:17:34+01:00 (London)
Detail page last modified on 2023-05-26T15:30:55+01:00 (London)
ISBN/EAN: 3642077285
ISBN - alternate spelling:
3-642-07728-5, 978-3-642-07728-9
Alternate spelling and related search-keywords:
Book author: baltes, brand, lange
Book title: sensors
Information from Publisher
Author: D. Lange; O. Brand; H. Baltes
Title: Microtechnology and MEMS; CMOS Cantilever Sensor Systems - Atomic Force Microscopy and Gas Sensing Applications
Publisher: Springer; Springer Berlin
142 Pages
Publishing year: 2010-12-04
Berlin; Heidelberg; DE
Printed / Made in
Language: English
106,99 € (DE)
109,99 € (AT)
118,00 CHF (CH)
POD
VIII, 142 p.
BC; Hardcover, Softcover / Technik/Maschinenbau, Fertigungstechnik; Nanotechnologie; Verstehen; Atomic force microscopy; CMOS compatible micromachining; Cantilever; Chemical sensors; Sensor; Sensors; microscopy; Nanotechnology; Microsystems and MEMS; Applied and Technical Physics; Control, Robotics, Automation; Technology and Engineering; Measurement Science and Instrumentation; Elektronik; Angewandte Physik; Regelungstechnik; Ingenieurswesen, Maschinenbau allgemein; Wissenschaftliche Standards, Normung usw. BB
This book introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of physical quantities such as forces and mass changes. The book is divided into three parts. First fabrication aspects and the mechanisms of cantilever resonators are introduced. Of the possible driving and sensing mechanisms, electrothermal and magnetic excitation, as well as piezoresistive detection and the use of MOS transistors for the deflection detection are introduced. This is followed by two application examples: The use of resonant cantilevers for the mass-sensitive detection of volatile organic compounds, and force sensor arrays for parallel Scanning Atomic Force Microscopy (AFM) of large areas.This book describes a vital measuring principle for analysing integrated circuits with a nano-electro-mechanical system Includes supplementary material: sn.pub/extras
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