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High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers - Chae, Junseok
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Chae, Junseok:

High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers - Paperback

2009, ISBN: 9783639184280

[ED: Softcover], [PU: VDM Verlag Dr. Müller], High performance, micro-g resolution, small size, low cost, low power accelerometers are needed in many applications such as inertial navigat… More...

Shipping costs:Free shipping. (EUR 0.00) buecher.de GmbH & Co. KG
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High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers - Chae, Junseok
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Chae, Junseok:

High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers - Paperback

2009, ISBN: 9783639184280

[ED: Softcover], [PU: VDM Verlag Dr. Müller], High performance, micro-g resolution, small size, low cost, low power accelerometers are needed in many applications such as inertial navigat… More...

Shipping costs:Versandkostenfrei, Versand nach Deutschland. (EUR 0.00) buecher.de GmbH & Co. KG
3
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Junseok Chae:
High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers - Paperback

2009

ISBN: 3639184289

[EAN: 9783639184280], Neubuch, [PU: VDM Verlag Aug 2009], Neuware - High performance, micro-g resolution, small size, low cost, low power accelerometers are needed in many applications su… More...

NEW BOOK. Shipping costs:Versandkostenfrei. (EUR 0.00) Rheinberg-Buch, Bergisch Gladbach, Germany [53870650] [Rating: 5 (von 5)]
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High-sensitivity Low-noise Multi-axis Capacitive Micro-accelerometers - Junseok Chae
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Junseok Chae:
High-sensitivity Low-noise Multi-axis Capacitive Micro-accelerometers - Paperback

ISBN: 9783639184280

High-sensitivity Low-noise Multi-axis Capacitive Micro-accelerometers ab 67.99 € als Taschenbuch: For inertial sensing applications. Aus dem Bereich: Bücher, Wissenschaft, Technik, Medien… More...

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High-sensitivity Low-noise Multi-axis Capacitive Micro-accelerometers - Junseok Chae
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Junseok Chae:
High-sensitivity Low-noise Multi-axis Capacitive Micro-accelerometers - Paperback

ISBN: 9783639184280

High-sensitivity Low-noise Multi-axis Capacitive Micro-accelerometers ab 67.99 € als Taschenbuch: For inertial sensing applications. Aus dem Bereich: Bücher, Wissenschaft, Technik, Medien… More...

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High-sensitivity Low-noise Multi-axis Capacitive Micro-accelerometers

High performance, micro-g resolution, small size, low cost, low power accelerometers are needed in many applications such as inertial navigation, Unmanned Aerial Vehicles (UAVs), and GPS augmentation. Several sensing methods have been used, including piezoresistive/electric, resonant, tunneling, and capacitive techniques. Capacitive sensing has several advantages in terms of high sensitivity, stable DC-characteristics, low power dissipation, low temperature sensitivity, and low noise floor. This research work demonstrates full functionality of high- sensitivity, low-noise capacitive multi-axis accelerometers. In order to achieve micro-g resolution, two different structures have been utilized: a Silicon-On-Glass (SOG) accelerometer, and an all-silicon accelerometer. A monolithic fabrication technique for Post-CMOS MEMS is also developed. Finally, a 3-axis single-chip accelerometer is presented. The 3-axis accelerometer shows 3pF/g sensitivity and sub-µg/rtHz mechanical noise floor. The 3-axis accelerometer with the readout circuit provides noise floor of 1.6µg/rtHz and 1.1µg/rtHz for in-plane and out-of- plane devices, respectively.

Details of the book - High-sensitivity Low-noise Multi-axis Capacitive Micro-accelerometers


EAN (ISBN-13): 9783639184280
ISBN (ISBN-10): 3639184289
Hardcover
Paperback
Publishing year: 2009
Publisher: VDM Verlag Dr. Müller

Book in our database since 2007-02-16T20:19:05+00:00 (London)
Detail page last modified on 2023-10-23T14:48:31+01:00 (London)
ISBN/EAN: 9783639184280

ISBN - alternate spelling:
3-639-18428-9, 978-3-639-18428-0
Alternate spelling and related search-keywords:
Book title: noise, micro, high low, against axis, the why axis


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