High Density Plasma Sources: Design, Physics and Performance (Materials Science and Process Technology) - First edition
1996, ISBN: 9780815517894
William Andrew, Kindle Edition, Auflage: 1, 465 Seiten, Publiziert: 1996-12-31T00:00:00.000Z, Produktgruppe: Digital Ebook Purchas, Architecture & Microprocessors, Computer Science, Compu… More...
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ISBN: 9780815517894
This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and … More...
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ISBN: 9780815517894
This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and … More...
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ISBN: 9780815517894
High Density Plasma Sources - Design Physics and Performance: ab 154.99 € eBooks > Fachthemen & Wissenschaft > Wissenschaften allgemein Elsevier Science & Techn. eBook als epub, Elsevier … More...
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1996, ISBN: 9780815517894
Design, Physics and Performance, eBooks, eBook Download (EPUB,PDF), Auflage, [PU: Elsevier Science], Seiten: 465, [ED: 1], Elsevier Science, 1996
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High Density Plasma Sources: Design, Physics and Performance (Materials Science and Process Technology) - First edition
1996, ISBN: 9780815517894
William Andrew, Kindle Edition, Auflage: 1, 465 Seiten, Publiziert: 1996-12-31T00:00:00.000Z, Produktgruppe: Digital Ebook Purchas, Architecture & Microprocessors, Computer Science, Compu… More...
ISBN: 9780815517894
This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and … More...
ISBN: 9780815517894
This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and … More...
ISBN: 9780815517894
High Density Plasma Sources - Design Physics and Performance: ab 154.99 € eBooks > Fachthemen & Wissenschaft > Wissenschaften allgemein Elsevier Science & Techn. eBook als epub, Elsevier … More...
1996, ISBN: 9780815517894
Design, Physics and Performance, eBooks, eBook Download (EPUB,PDF), Auflage, [PU: Elsevier Science], Seiten: 465, [ED: 1], Elsevier Science, 1996
Bibliographic data of the best matching book
Details of the book - High Density Plasma Sources: Design, Physics and Performance Oleg A. Popov Author
EAN (ISBN-13): 9780815517894
Publishing year: 12
Publisher: Elsevier Science Digital >16
Book in our database since 2007-04-21T05:55:58+01:00 (London)
Detail page last modified on 2024-01-26T07:11:06+00:00 (London)
ISBN/EAN: 9780815517894
ISBN - alternate spelling:
978-0-8155-1789-4
Alternate spelling and related search-keywords:
Book author: oleg popov
Book title: sources the self, high performance, plasma physics, popov oleg, design design
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