ISBN: 9780792395348
The drive toward new semiconductor technologies is intricately related to market demands for cheaper, smaller, faster, and more reliable circuits with lower power consumption. The develop… More...
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1994, ISBN: 9780792395348
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ISBN: 9780792395348
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1994, ISBN: 0792395344
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ISBN: 9780792395348
The drive toward new semiconductor technologies is intricately related to market demands for cheaper, smaller, faster, and more reliable circuits with lower power consumption. The develop… More...
1994, ISBN: 9780792395348
[PU: Springer US], Gebrauchs- und Lagerspuren. AuÃ?en: verschmutzt, angestoÃ?en. Innen: Seiten eingerissen, Seiten verschmutzt. 2511599/3, DE, [SC: 0.00], gebraucht; gut, gewerbliches Ang… More...
ISBN: 9780792395348
Fundamentals Of Semiconductor Processing Technology. Like New, Festpreisangebot, [LT: FixedPrice], Bestes Angebot, [LT: BestOffer], [PU: Kluwer Academic Publishers]
1994, ISBN: 0792395344
[EAN: 9780792395348], Used, as new, [PU: Springer], Like New, Books
1994, ISBN: 0792395344
[EAN: 9780792395348], New book, [PU: Springer], new, Books
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Details of the book - Fundamentals of Semiconductor Processing Technology
EAN (ISBN-13): 9780792395348
ISBN (ISBN-10): 0792395344
Hardcover
Publishing year: 2007
Publisher: Springer
616 Pages
Weight: 1,081 kg
Language: eng/Englisch
Book in our database since 2007-10-21T18:41:45+01:00 (London)
Detail page last modified on 2024-04-15T16:23:23+01:00 (London)
ISBN/EAN: 9780792395348
ISBN - alternate spelling:
0-7923-9534-4, 978-0-7923-9534-8
Alternate spelling and related search-keywords:
Book author: hutter, hütter
Book title: semiconductor, fundamentals semiconductors, fundamentals technology
Information from Publisher
Author: Badih El-Kareh; Lou N. Hutter
Title: Fundamentals of Semiconductor Processing Technology
Publisher: Springer; Springer US
602 Pages
Publishing year: 1994-12-31
New York; NY; US
Language: English
235,39 € (DE)
241,99 € (AT)
260,00 CHF (CH)
Available
XIII, 602 p.
BB; Hardcover, Softcover / Physik, Astronomie/Atomphysik, Kernphysik; Elektronische Geräte und Materialien; Verstehen; Wafer; circuit; development; dielectrics; interconnect; manufacturing; material; materials science; semiconductor; thin films; Semiconductors; Electronics and Microelectronics, Instrumentation; Electronic Circuits and Systems; Electrical and Electronic Engineering; Elektronik; Schaltkreise und Komponenten (Bauteile); Elektrotechnik; BC
1 Semiconductor Crystals.- 1.1 Crystals and Crystallographic Orientations.- 1.2 The Silicon Crystal.- 1.3 Wafer Preparation.- 1.4 Compound Semiconductors.- 2 Thermal Oxidation and Nitridation.- 2.1 SiO2 and SiO2-Si Interface.- 2.2 Thermal Oxidation.- 2.3 Silicon Nitride.- 3 Thin Film Deposition.- 3.1 Chemical Vapor Deposition.- 3.2 Chemical-Physical Deposition Processes.- 3.3 Physical-Vapor Deposition.- 4 Lithography.- 4.1 Optical Lithography.- 4.2 Resolution Enhancement Techniques.- 4.3 Electron-Beam Lithography.- 4.4 X-Ray Lithography.- 4.5 Ion-Beam Lithography.- 5 Contamination Control and Etch.- 5.1 Clean Processes.- 5.2 Etching.- 6 Ion Implantation.- 6.1 Principle of Operation.- 6.2 Energy Loss and Range Distribution.- 6.3 Crystal Damage and Dopant Activity.- 7 Diffusion.- 7.1 Point Defects.- 7.2 Fick’s Laws.- 7.3 Non-Constant Diffusivity.- 7.4 Diffusion in Polysilicon.- 7.5 Diffusion in Insulators.- 7.6 Diffusion Sources.- 7.7 Gettering in Silicon.- 8 Contact and Interconnect Technology.- 8.1 Contact Metallurgy.- 8.2 Poly-Metal Dielectrics.- 8.3 Metal Interconnects.- 8.4 Inter-Level Dielectrics.- 8.5 Multi-Level Metals.- 8.6 Reliability Considerations.More/other books that might be very similar to this book
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