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Lorenzzi, Jean:

Boron nitride thin films - deposited by magnetron sputtering on Si3N4 - Paperback

2010, ISBN: 9783639076356

[ED: Taschenbuch / Paperback], [PU: VDM Verlag Dr. Müller], In this work we present the results of the thin films of boron nitride deposited by D.C. and R.F. magnetron sputtering from hot… More...

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Lorenzzi, Jean:

Boron nitride thin films - Paperback

2010, ISBN: 9783639076356

[ED: Softcover], [PU: VDM Verlag Dr. Müller], In this work we present the results of the thin films of boron nitride deposited by D.C. and R.F. magnetron sputtering from hot-pressed B4C a… More...

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Jean Lorenzzi:
Boron nitride thin films - Paperback

2010

ISBN: 3639076354

[EAN: 9783639076356], Neubuch, [PU: VDM Verlag Jul 2010], Neuware - In this work we present the results of the thin films of boron nitride deposited by D.C. and R.F. magnetron sputtering … More...

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Jean Lorenzzi:
Boron nitride thin films - Paperback

ISBN: 9783639076356

Paperback, [PU: VDM Verlag], In this work we present the results of the thin films of boron nitride deposited by D.C. and R.F. magnetron sputtering from hot-pressed B4C and h-BN targets o… More...

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Boron nitride thin films: deposited by magnetron sputtering on Si3N4 - Lorenzzi, Jean
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Lorenzzi, Jean:
Boron nitride thin films: deposited by magnetron sputtering on Si3N4 - Paperback

2010, ISBN: 9783639076356

VDM Verlag Dr. Müller, Taschenbuch, 96 Seiten, Publiziert: 2010-08-10T00:00:01Z, Produktgruppe: Buch, 0.34 kg, Maschinenbau, Ingenieurwissenschaften, Fachbücher, Kategorien, Bücher, Ingen… More...

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Boron nitride thin films: deposited by magnetron sputtering on Si3N4
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ISBN:

3639076354


In this work we present the results of the thin films of boron nitride deposited by D.C. and R.F. magnetron sputtering from hot-pressed B4C and h-BN targets on two different substrates: Si3N4 ceramics with different surface finishing and Si(100) wafers. The influence of parameters such as substrate temperature and working gas composition ratio (N2 or Ar), on film thickness, deposition rate, cristallinity, residual stress, phase composition and hardness, were systematically investigated using techniques like SEM, XRD, FT-IR and nanohardness.

Details of the book - Boron nitride thin films: deposited by magnetron sputtering on Si3N4


EAN (ISBN-13): 9783639076356
ISBN (ISBN-10): 3639076354
Hardcover
Paperback
Publishing year: 2010
Publisher: VDM Verlag Dr. Müller

Book in our database since 2007-12-22T14:17:24+00:00 (London)
Detail page last modified on 2022-11-13T02:47:29+00:00 (London)
ISBN/EAN: 3639076354

ISBN - alternate spelling:
3-639-07635-4, 978-3-639-07635-6
Alternate spelling and related search-keywords:
Book title: boron, magnetron, thin films, seeing through films, nitride, sputtering

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