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CCD Image Sensors in Deep-Ultraviolet - Li, FloraNathan, Arokia
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Li, FloraNathan, Arokia:

CCD Image Sensors in Deep-Ultraviolet - hardcover

2005, ISBN: 9783540226802

[ED: Hardcover], [PU: Springer / Springer Berlin Heidelberg / Springer, Berlin], As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and… More...

Shipping costs:Versandkostenfrei, Versand nach Deutschland. (EUR 0.00) buecher.de GmbH & Co. KG
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CCD Image Sensors in Deep-Ultraviolet - Flora Li
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CCD Image Sensors in Deep-Ultraviolet - new book

2001, ISBN: 9783540226802

[ED: Buch], [PU: Springer-Verlag GmbH], Neuware - As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are… More...

Shipping costs:Versandkostenfrei, Versand nach Deutschland. (EUR 0.00) Buchhandlung Kisch & Co.
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CCD Image Sensors in Deep-Ultraviolet - Flora Li
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Flora Li:
CCD Image Sensors in Deep-Ultraviolet - new book

2001

ISBN: 9783540226802

[ED: Buch], [PU: Springer-Verlag GmbH], Neuware - As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are… More...

Shipping costs:Versandkostenfrei, Versand nach Deutschland. (EUR 0.00) Mein Buchshop
4
CCD Image Sensors in Deep-Ultraviolet - Flora Li
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€ 212.13
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Flora Li:
CCD Image Sensors in Deep-Ultraviolet - new book

2001, ISBN: 9783540226802

[ED: Buch], [PU: Springer-Verlag GmbH], Neuware - As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are… More...

Shipping costs:Versandkostenfrei, Versand nach Deutschland. (EUR 0.00) Buchhandlung - Bides GbR
5
CCD Image Sensors in Deep-Ultraviolet Degradation Behavior and Damage Mechanisms - Li, Flora; Nathan, Arokia
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Li, Flora; Nathan, Arokia:
CCD Image Sensors in Deep-Ultraviolet Degradation Behavior and Damage Mechanisms - hardcover

2005, ISBN: 354022680X

2005 Gebundene Ausgabe Mikrotechnologie - Mikrotechnik, Technologie / Mikrotechnologie, Sensor - Sensorik, Ingenieurwissenschaft - Ingenieurwissenschaftler, Maschinenbau, Materialwissen… More...

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CCD Image Sensors in Deep-Ultraviolet: Degradation Behavior and Damage Mechanisms (Microtechnology and MEMS)

As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths. TOC:Introduction.- Overview of CCD.- CCD Imaging in the Ultraviolet Regime.- Silicon.- Silicon Dioxide.- Si-SiO2 Interface.- General Effects of Radiation.- Effects of Radiation on CCDs.- UV-Induced Effects in Silicon.- UV-Laser-Induced Effects in SiO2.- UV-Laser-Induced Effects in the Si-SiO2 Interface.- CCD Measurements at 157 nm.- Design Optimizations for Future Research.- Concluding Remarks.- Glossary.

Details of the book - CCD Image Sensors in Deep-Ultraviolet: Degradation Behavior and Damage Mechanisms (Microtechnology and MEMS)


EAN (ISBN-13): 9783540226802
ISBN (ISBN-10): 354022680X
Hardcover
Paperback
Publishing year: 2002
Publisher: Springer-Verlag GmbH

Book in our database since 2007-05-22T10:58:04+01:00 (London)
Detail page last modified on 2022-08-05T17:33:25+01:00 (London)
ISBN/EAN: 354022680X

ISBN - alternate spelling:
3-540-22680-X, 978-3-540-22680-2
Alternate spelling and related search-keywords:
Book author: flora
Book title: mems, sensor, flora heidelberg, ccd, into the deep, deep value, damage, degradation, ultraviolet


Information from Publisher

Author: Flora Li; Arokia Nathan
Title: Microtechnology and MEMS; CCD Image Sensors in Deep-Ultraviolet - Degradation Behavior and Damage Mechanisms
Publisher: Springer; Springer Berlin
232 Pages
Publishing year: 2005-03-01
Berlin; Heidelberg; DE
Language: English
160,49 € (DE)
164,99 € (AT)
177,00 CHF (CH)
Available
XII, 232 p. 84 illus.

BB; Hardcover, Softcover / Technik/Maschinenbau, Fertigungstechnik; Technische Anwendung von elektronischen, magnetischen, optischen Materialien; Verstehen; Ingenieurwissenschaften; Physik; CCD image sensor; Deep-UV damage mechanisms; Eximer laser; Photodiode; Sensor; UV photodiodes; design; imaging; integrated circuit; laser; optimization; semiconductor; technology; Optical Materials; Laser; Technology and Engineering; Electronics and Microelectronics, Instrumentation; Laserphysik; Ingenieurswesen, Maschinenbau allgemein; Elektronik; EA; BC

Overview of CCD.- CCD Imaging in the Ultraviolet (UV) Regime.- Silicon.- Silicon Dioxide.- Si-SiO2 Interface.- General Effects of Radiation.- Effects of Radiation on CCDs.- UV-Induced Effects in Si.- UV Laser Induced Effects in SiO2.- UV Laser Induced Effects at the Si-SiO2 Interface.- CCD Measurements at 157nm.- Design Optimizations for Future Research.- Concluding Remarks.
The first book to integrate CCD image sensor characteristics, their intrinsic instabilities, and the effect of UV radiation on device characteristics

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9783642061523 CCD Image Sensors in Deep-Ultraviolet: Degradation Behavior and Damage Mechanisms (Microtechnology and MEMS) (Li, Flora)


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